This one-day class provides a technically accurate description of the key manufacturing technologies used in microchip manufacturing, what role each technology plays, and their relative strengths and weaknesses.

Course Description:

Each new generation of microchips is critically dependent on the technology of the tools that are used to manufacture them. Indeed, it s not an exaggeration to say that each new generation of microchip technology is preceded by a new generation of manufacturing tools that represent a evolution of existing technology, or a completely new and revolutionary manufacturing methodology.

This course provides a technically accurate introduction to modern semiconductor manufacturing technologies. It covers all of the most important areas such as Chemical Mechanical Polishing (CMP), Physical Vapor Deposition (PVD), Chemical Vapor Deposition (CVD), Micro-lithography, Etch, Atomic Layer Deposition (ALD) and Ion Implantation. The basic principles that each technology employs are presented, the key role that the technology plays in microchip manufacturing is described, and the latest tools that employ these technologies are discussed.

The course notes are extensively illustrated with state-of-the-art 2D and 3D full color graphics, and feature numerous cross-sectional and top-down SEM and TEM photographs of leading edge commercial device structures and typical processing defects. The course highlights the importance of each topic it treats in the real world of manufacturing commercial semiconductor integrated circuits with high yields. The class is taught in a highly interactive style with key question reviews for each module. In-class exercises are provided, which employ real-world case studies that have been selected to be appropriate for the level of the course.

This course is one day in length, and is targeted at IC designers, process engineers, technical managers and other technical personnel who are familiar with the basics of microchip manufacturing, but who desire a deeper understanding of the underlying technologies used to manufacture microchips.

Course Topics:

• Photolithography
• Plasma Etching
• Ion Implantation
• Thermal Processing (furnace, RTP)
• Chemical Vapor Deposition (CVD, PECVD)
• Physical Vapor Deposition (PVD)
• Chemical Mechanical Polishing (CMP)
• Atomic Layer Deposition (ALD)
• Wafer cleaning

COST: $595/Student

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