This alternative delivery educational product addresses the need for an introductory course on the topic of CMP that is current, technically correct, and targeted at an engineering audience. The CD ROM based product offers portability, time flexibility, and can be taken at a user defined pace. It does not require the expense of a classroom, or for the employee to miss work to attend a training class. The course presents a unique instructional design that is interactive, visually compelling, and incorporates real-time testing feedback. It also incorporates compelling visualization of key technical concepts with 2-D and 3-D full color graphics.

Alternate delivery addresses several key problems associated with traditional classroom instruction:

• the difficulty of scheduling groups for courses that are large enough to make them cost effective; alternate delivery allows high scheduling flexibility - one student at a time

• elimination of lost time from work to attend class

• elimination of travel time and cost

• very high training penetration of target populations in a short time frame and at a significant cost reduction

In addition, alternate delivery CD ROM based courses offer unique advantages that are not present in tradition classroom based instruction:

• time flexibility: the course can be taken at the student's convenience

• portability: the course does not require a classroom

• the course does not have to be completed in one sitting

• students can learn at their own pace

• course material can be repeated if a concept is not grasped by a student on the first pass

Visually Reinforced Instructional Design

The course features a highly visual interface with extensive reinforcement of key concepts and principles through the use of color 2D and 3D graphics, and dynamic visuals presentations. In addition, a soundtrack provides detailed technical narration throughout the course.

Interactive Design

In addition, there are relevant VMRL illustrations that can be manipulated by the user to provide the student with insight into the 3-dimensional character of microstructures.

Real-Time Feedback

Each of the course sections is followed by a multiple-choice quiz on the material covered; the student receives immediate feedback on incorrect answers.

The course is concluded with a comprehensive final exam consisting of multiple choice and True/False questions. After completion of the final exam, the student is then presented with a final grade, and walked through the slides containing the answers to questions that he/she incorrectly answered.

Course Topics

• Where and why CMP is used

• The CMP of Oxides

• The CMP of Tungsten and Copper

• Endpoint Detection and Metrology

• Post CMP Cleaning

• Pads/Slurries

• Sources of Defectivity

• CMP Equipment

Intended Audience

• Engineers and technicians new to the Semiconductor Industry

• Experienced engineers and technicians who are new to CMP

• Design, Process and Device engineers who want to familiarize themselves with the technical fundamentals of CMP

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